검색결과 : 1건
No. | Article |
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1 |
Cu films deposition by dielectric barrier discharge in supercritical CO2, Ar and Xe environments Kikuchi H, Kubo H, Tomai T, Terashima K Thin Solid Films, 516(19), 6677, 2008 |
No. | Article |
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1 |
Cu films deposition by dielectric barrier discharge in supercritical CO2, Ar and Xe environments Kikuchi H, Kubo H, Tomai T, Terashima K Thin Solid Films, 516(19), 6677, 2008 |