검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Silicide Formation of Atomic Layer Deposition Co Using Ti and Ru Capping Layer Yoon J, Lee HBR, Gu GH, Park CG, Kim H Korean Journal of Materials Research, 22(4), 202, 2012 |
| No. | Article |
|---|---|
| 1 |
Silicide Formation of Atomic Layer Deposition Co Using Ti and Ru Capping Layer Yoon J, Lee HBR, Gu GH, Park CG, Kim H Korean Journal of Materials Research, 22(4), 202, 2012 |