검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Cathode ray tube type electron gun as a source for multibeam electron lithography van den Brom AJ, van Veen AHV, Weeda WM, Berglund GZM, Wieland M, Kruit P Journal of Vacuum Science & Technology B, 25(6), 2245, 2007 |
| 2 |
Fabrication and characterization of p-type silicon field-emitter arrays for lithography Teepen TF, van Veen AHV, van't Spijker H, Steenbrink SWHK, van Zuuk A, Heerkens CTH, Wieland MJ, van Druten NJ, Kruit P Journal of Vacuum Science & Technology B, 23(2), 359, 2005 |
| 3 |
Reduced brightness of the ZrO/W Schottky electron emitter van Veen AHV, Hagen CW, Barth JE, Kruit P Journal of Vacuum Science & Technology B, 19(6), 2038, 2001 |