검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Spectroscopic and kinetic ellipsometry studies of hot-wire deposited polycrystalline silicon on glass van Veenendaal PATT, van der Mark GWM, Rath JK, Schropp REI Thin Solid Films, 430(1-2), 41, 2003 |
| 2 |
The influence of the filament temperature on the structure of hot-wire deposited silicon van der Werf CHM, van Veenendaal PATT, van Veen MK, Hardeman AJ, Rusche MYS, Rath JK, Schropp REI Thin Solid Films, 430(1-2), 46, 2003 |
| 3 |
Deposition of HWCVD poly-Si films at a high growth rate Rath JK, Hardeman AJ, van der Werf CHM, van Veenendaal PATT, Rusche MYS, Schropp REI Thin Solid Films, 430(1-2), 67, 2003 |
| 4 |
Investigation of scaling-up issues in hot-wire CVD of polycrystalline silicon van der Werf CHM, Hardeman AJ, van Veenendaal PATT, van Veen MK, Rath JK, Schropp REI Thin Solid Films, 427(1-2), 41, 2003 |
| 5 |
Microwave mobility in profiled poly-Si thin films deposited on glass by hot-wire CVD van Veenendaal PATT, Savenije TJ, Rath JK, Schropp REI Thin Solid Films, 403-404, 175, 2002 |
| 6 |
The influence of different catalyzers in hot-wire CVD for the deposition of polycrystalline silicon thin films van Veenendaal PATT, Gijzeman OLJ, Rath JK, Schropp REI Thin Solid Films, 395(1-2), 194, 2001 |
| 7 |
Application of hot-wire chemical vapor-deposited Si : H films in thin film transistors and solar cells Rath JK, Stannowski B, van Veenendaal PATT, van Veen MK, Schropp REI Thin Solid Films, 395(1-2), 320, 2001 |