검색결과 : 1건
No. | Article |
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1 |
Surface morphology of Kr+-polished amorphous Si layers van den Boogaard AJR, Louis E, Zoethout E, Mullender S, Bijkerk F Journal of Vacuum Science & Technology A, 28(4), 552, 2010 |
No. | Article |
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1 |
Surface morphology of Kr+-polished amorphous Si layers van den Boogaard AJR, Louis E, Zoethout E, Mullender S, Bijkerk F Journal of Vacuum Science & Technology A, 28(4), 552, 2010 |