검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy Gielis JJH, Hoex B, van den Oever PJ, de Sanden MCMV, Kessels WMM Thin Solid Films, 517(12), 3456, 2009 |
| 2 |
Hot-wire deposition of a-Si : H thin films on wafer substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy van den Oever PJ, Gielis JJH, de Sanden MCMV, Kessels WMM Thin Solid Films, 516(5), 511, 2008 |
| 3 |
Production mechanisms of NH and NH2 radicals in N-2-H-2 plasmas van Helden JH, van den Oever PJ, Kessels WMM, de Sanden MCMV, Schram DC, Engeln R Journal of Physical Chemistry A, 111(45), 11460, 2007 |