Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A, Vol.15, No.1 Entire volume, number list

ISSN: 0734-2101 (Print)

In this Issue (34 articles)

1 - 9	Surface Oxidation Chemistry of Beta-SiC Pehrsson PE, Thoms BD
10 - 17	Relaxation of Interfacial Stress and Improved Quality of Heteroepitaxial 3C-SiC Films on (100)Si Deposited by Organometallic Chemical-Vapor-Deposition at 1200-Degrees-C Veprek S, Kunstmann T, Volm D, Meyer BK
18 - 20	Evidence for the Appearance of Carbon-Rich Layer at the Interface of SiC Film Si Substrate Sonoda N, Sun Y, Miyasato T
21 - 28	Some Effects of Boron and Phosphorus Doping on the Properties of SiC-H Films Prepared Using Electron-Cyclotron Resonance-Chemical Vapor-Deposition Yoon SF, Ji R, Ahn J, Milne WI
29 - 33	Heterogeneous Hydride Pyrolysis in a Chemical Beam Epitaxy Cracker Cell and Growth of High-Quality InP Rongen RT, Leys MR, Vanhall PJ, Vonk H, Wolter JH
34 - 38	Properties of Vanadium-Oxide Thin-Films for Ethanol Sensor Micocci G, Serra A, Tepore A, Capone S, Rella R, Siciliano P
39 - 42	Surface Damage in the Submonolayer Growth of Carbon on Si(111)7X7 by Means of the Laser-Ablation Deposition Technique Diaz J, Martingago JA, Ferrer S, Comin F
43 - 47	Influence of Growth-Conditions on the Residual Strain in Thick Metalorganic Vapor-Phase Epitaxy-Grown InGaAs Epilayers Maigne P
48 - 51	Effect of N-2 Partial-Pressure on the Structure of MgO Thin-Films Deposited by Radio Frequency-Magnetron Sputtering with Single-Crystal MgO Target Misaki Y, Mikawa M, Ishiguro T, Hamasaki K
52 - 56	Deposition and X-Ray Photoelectron-Spectroscopy Studies on Sputtered Cerium Dioxide Thin-Films Sundaram KB, Wahid PF, Melendez O
57 - 61	Intrinsic Stress Dependence of C-Axis Orientation Ratio in PbTiO3 Thin-Films Deposited by Reactive Sputtering Kweon SY, Yi SH, Choi SK
62 - 65	Ion-Assisted Deposition of Thin-Films by Substrate Tuned Radio-Frequency Magnetron Sputtering Lousa A, Gimeno S
66 - 71	Study of Particulate Formation and Its Control by a Radio-Frequency Power Modulation in the Reactive Ion Etching Process of SiO2 with CF4/H-2 Plasma Yeon CK, Whang KW
72 - 76	Mass Spectroscopic Study for Vaporization Characteristics of Ba(Tmhd)(2) and Sr(Tmhd)(2) in Electron-Cyclotron Resonance-Plasma Enhanced Metal-Organic Chemical-Vapor-Deposition Lee JS, Song HW, Kim KS, Yu BG, Jeong YH, Jiang ZT, No K
77 - 84	Dominant Monohydride Bonding in Hydrogenated Amorphous-Silicon Thin-Films Formed by Plasma-Enhanced Chemical-Vapor-Deposition at Room-Temperature Srinivasan E, Lloyd DA, Parsons GN
85 - 92	Preparation and Microstructural Study of CeO2 Thin-Films Tian CY, Du Y, Chan SW
93 - 98	Sputter-Deposition of Boron-Nitride Using Neon-Nitrogen Discharges Heil RB, Aita CR
99 - 106	Structure and Mechanical-Properties of Dual-Ion-Beam Deposited Cnxtiy/Tin Multilayers Zhao XA, Ong CW, Tsang YC, Choy CL, Chan PW
107 - 112	Synthesis of Carbon Nitride Films at Low-Temperature Hammer P, Baker MA, Lenardi C, Gissler W
113 - 126	Global-Model for High-Pressure Electronegative Radiofrequency Discharges Lee YT, Lieberman MA, Lichtenberg AJ, Bose F, Baltes H, Patrick R
127 - 132	Effects of Hydrogenation of Hydrogen Termination of P(+)-Silicon(100) Surfaces by Hydrofluoric-Acid Kosugi T, Ishii H, Arita Y
133 - 137	Si(110)2X3-Sb Surface Studied with Angle-Resolved Photoemission Cricenti A, Lelay G, Nesterenko B, Perfetti P, Sebenne C
138 - 144	Use of Surface Photoabsorption to Analyze the Optical-Response of GaAs(001) Surfaces Eryigit R, Marschel PK, Herman IP
145 - 148	In-Situ Diagnostic Studies of Reactive Cosputtering from 2 Targets by Means of Soft-X-Ray and Optical-Emission Spectroscopy Nyberg T, Skytt P, Galnander B, Nender C, Nordgren J, Berg S
149 - 153	Detection of Hydrogen-Atoms in Silane Plasmas Using Laser-Induced Fluorescence by Lyman-Alpha 2-Photon and Simultaneous Balmer-Alpha Excitations Miyazaki K, Kajiwara T, Uchino K, Muraoka K, Okada T, Maeda M
154 - 168	Experimental Investigation of the Matching and Impressed Electric-Field of a Multipolar Electron-Cyclotron-Resonance Discharge Mak P, Asmussen J
169 - 175	Tritium Permeation and Inventory in an International Thermonuclear Experimental Reactor Divertor Shu WM, Watanabe K
176 - 181	Improved Mass-Spectrometer Measurements Using a Pulsed Gas Sampling System Sodal IE, Hanna DA
182 - 186	Silicon Crystal Heating and Thermocouple Mounting Designs Nishino H, Yang W, Dohnalek Z, Ukraintsev VA, Choyke WJ, Yates JT
187 - 191	Combination of a Cryopump and a Nonevaporable Getter Pump in Applications Giannantonio R, Succi M, Solcia C
192 - 195	Combined Reflectance Anisotropy and Photoemission Spectroscopies of Cs/GaAs(001) Interface Formation Gusev AO, Paget D, Aristov VY, Soukiassian P, Berkovits VL, Thierrymieg V
196 - 200	Orientation-Dependence of Elastic Strain-Energy in Hexagonal and Cubic Boron-Nitride Layers in Energetically Deposited BN Films Cardinale GF, Medlin DL, Mirkarimi PB, Mccarty KF, Howitt DG
201 - 205	Safety Interlock and Remote Computer Monitoring for a Diffusion-Pumped Vacuum-System Chu LT
206 - 206	Estimation and Verification of the Optical-Properties of Indium-Tin-Oxide Based on the Energy-Band Diagram (Vol a 14, Pg 757, 1996) Knickerbocker SA, Kulkarni AK