화학공학소재연구정보센터

Plasma Chemistry and Plasma Processing

Plasma Chemistry and Plasma Processing, Vol.16, No.3 Entire volume, number list
ISSN: 0272-4324 (Print) 

In this Issue (9 articles)

287 - 300 2-Term and Multi-Term Approximation of the Nonstationary Electron Velocity Distribution in an Electric-Field in a Gas
Loffhagen D, Winkler R, Braglia GL
301 - 327 A Comparative-Study of CH4 and CF4 RF Discharges Using a Consistent Plasma Physics and Chemistry Simulator
Mantzaris NV, Gogolides E, Boudouvis AG
329 - 340 Oxidation of Aromatic-Hydrocarbons with Oxygen in a Radiofrequency Plasma
Tezuka M, Yajima T
341 - 363 Plasma-Induced Deposition of Titanium Nitride from TiCl4 in a Direct-Current Glow-Discharge - Control of the Chlorine Content and Gas-Phase Nucleation
Patscheider J, Li SZ, Veprek S
365 - 378 Dry-Etching of InGaP and Alinp in CH4/H-2/Ar
Lee JW, Pearton SJ, Santana CJ, Lambers ES, Abernathy CR, Hobson WS, Ren F
379 - 398 Numerical-Method and Composition in Multitemperature Plasmas - Application to an Ar-H-2 Mixture
Andre P, Abbaoui M, Lefort A, Parizet MJ
399 - 415 Numerical-Analysis of the Behavior of Hydrogen Added into a Free-Burning Arc
Suzuki M, Sato Y, Akatsuka H
417 - 448 Laser-Based Characterization of a Flame-Assisted Plasma
Sassi M, Hwang J, Mahalingam S, Daily JW
449 - 460 UV Spectroscopy of Metal Volatilization During Thermal Plasma Processing of Waste Glass Melts
Wood JW, Cortez R, Cahill DG, Stephenson LD, Zaghloul HH