3413 - 3414 |
Fifth international conference on hot-wire CVD (Cat-CVD) process Preface Bouree JE, Mahan AH |
3415 - 3419 |
Frontiers in HWCVD Schropp REI |
3420 - 3423 |
New application of Cat-CVD technology and recent status of industrial implementation Matsumura H, Ohdaira K |
3424 - 3426 |
Degradation and silicidation of Ta- and W-filaments for different filament temperatures Kniffler N, Pflueger A, Scheller D, Schroeder B |
3427 - 3430 |
Hot wire chemical vapor deposition: limits and opportunities of protecting the tungsten catalyzer from silicide with a cavity Frigeri PA, Nos O, Bengoechea S, Frevert C, Asensi JM, Bertomeu J |
3431 - 3434 |
Reversibility of silicidation of Ta filaments in HWCVD of thin film silicon van der Werf CHM, Li H, Verlaan V, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI |
3435 - 3438 |
Effect of ammonia on Ta filaments in the hot wire CVD process Verlaan V, van der Werf CHM, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI |
3439 - 3442 |
Low temperature decomposition of large molecules of TMA using catalyzers with resistance to oxidation in catalytic CVD Ogita YI, Kudoh T, Iwai R |
3443 - 3445 |
Resistance characteristics to oxidation of the metal-catalyzer for Cat-CVD Kudoh T, Ogita YI |
3446 - 3448 |
Detection of radical species produced by catalytic decomposition of H-2, O-2 and their mixtures on heated Ir surfaces Umemoto H, Kusanagi H, Nishimura K, Ushijima M |
3449 - 3451 |
Estimation of hydrogen radical density generated from various kinds of catalysts Abe K, Ida M, Izumi A, Terashima S, Sudo T, Watanabe Y, Fukuda Y |
3452 - 3455 |
N-2 decomposition by hot wire and N-2 post-deposition treatment on hydrogenated microcrystalline silicon thin films Mazaki K, Tabata A, Kitagawa A, Kondo A |
3456 - 3460 |
Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy Gielis JJH, Hoex B, van den Oever PJ, de Sanden MCMV, Kessels WMM |
3461 - 3465 |
A mechanistic study of gas-phase reactions with 1,1,3,3-tetramethyl-1,3-disilacyclobutane in the hot-wire chemical vapor deposition process Tong L, Shi YJ |
3466 - 3471 |
Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures Le Normand F, Gulas M, Veis P, Cojocaru CS, Bouree JE |
3472 - 3475 |
Precursor Cat-CVD a-Si films for the formation of high-quality poly-Si films on glass substrates by flash lamp annealing Ohdaira K, Shiba K, Takemoto H, Fujiwara T, Endo Y, Nishizaki S, Jang YR, Matsumura H |
3476 - 3480 |
Hot wire CVD deposition of nanocrystalline silicon solar cells on rough substrates Li HBBT, van der Werf KHM, Rath JK, Schropp REI |
3481 - 3483 |
Hot-wire chemical vapor deposition of silicon nanoparticles on fused silica Salivati N, An YQ, Downer MC, Ekerdt JG |
3484 - 3487 |
Composition and crystallinity of silicon nanoparticles synthesised by hot wire thermal catalytic pyrolysis at different pressures Scriba MR, Britton DT, Arendse C, van Staden MJ, Harting M |
3488 - 3491 |
Post deposition annealing temperature effect on silicon quantum dots embedded in silicon nitride dielectric multilayer prepared by hot-wire chemical vapor deposition Panchal AK, Solanki CS |
3492 - 3495 |
Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition Liu FZ, Ma YH, Zhu MF, Yin PG |
3496 - 3498 |
Doping of high-quality epitaxial silicon grown by hot-wire chemical vapor deposition near 700 degrees C Martin IT, Branz HM, Stradins P, Young DL, Reedy RC, Teplin CW |
3499 - 3502 |
The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD Verlaan V, Verkerk AD, Arnoldbik WM, van der Werf CHM, Bakker R, Houweling ZS, Romijn IG, Borsa DM, Weeber AW, Luxembourg SL, Zeman M, Dekkers HFW, Schropp REI |
3503 - 3506 |
Deposition of silicon nitride thin films by hot-wire CVD at 100 degrees C and 250 degrees C Alpuim P, Goncalves LM, Marins ES, Viseu TMR, Ferdov S, Bouree JE |
3507 - 3512 |
Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells Finger F, Astakhov O, Bronger T, Carius R, Chen T, Dasgupta A, Gordijn A, Houben L, Huang Y, Klein S, Luysberg M, Wang H, Xiao L |
3513 - 3515 |
Microcrystalline silicon carbide thin films grown by HWCVD at different filament temperatures and their application in n-i-p microcrystalline silicon solar cells Chen T, Huang YL, Wang HY, Yang DR, Dasgupta A, Carius R, Finger F |
3516 - 3519 |
Growth of silicon carbide thin films by hot-wire chemical vapor deposition from SiH4/CH4/H-2 Tabata A, Komura Y, Narita T, Kondo A |
3520 - 3523 |
Importance of H-2 gas for growth of hot-wire CVD nanocrystalline 3C-SiC from SiH4/CH4/H-2 Hoshide Y, Komura Y, Tabata A, Kitagawa A, Kondo A |
3524 - 3527 |
Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N-2 as doping gas Hoshide Y, Tabata A, Kitagawa A, Kondo A |
3528 - 3531 |
The growth of GaN films by alternate source gas supply hot-mesh CVD method Komae Y, Saitou T, Suemitsu M, Ito T, Endoh T, Nakazawa H, Narita Y, Takata M, Akahane T, Yasui K |
3532 - 3535 |
A direct correlation between film structure and solar cell efficiency for HWCVD amorphous silicon germanium alloys Mahan AH, Xu Y, Gedvilas LM, Williamson DL |
3536 - 3538 |
Initiated chemical vapor deposition of polymer films on nonplanar substrates Baxamusa SH, Gleason KK |
3539 - 3542 |
iCVD growth of poly(N-vinylimidazole) and poly (N-vinylimidazole-co-N-vinylpyrrolidone) Chen GH, Lau KKS, Gleason KK |
3543 - 3546 |
Crosslinking of copolymer thin films by initiated chemical vapor deposition for hydrogel applications Tenhaeff WE, Gleason KK |
3547 - 3550 |
Surface modification of high aspect ratio structures with fluoropolymer coatings using chemical vapor deposition Gupta M, Gleason KK |
3551 - 3554 |
HWCVD of polymers: Commercialization and scale-up Lewis HGP, Bansal NP, White AJ, Handy ES |
3555 - 3558 |
Heat transfer model of an iCVD reactor Bakker R, Verlaan V, Verkerk AD, van der Werf CHM, van Dijk L, Rudolph H, Rath JK, Schropp REI |
3559 - 3561 |
HFCVD of diamond and its application as electrode in aluminum electrolysis Wang SS, Chen GH, Yang FL |
3562 - 3565 |
Combined model for growing mechanism of carbon nanotubes using HFCVD: effect of temperature and molecule gas diffusion Nguyen TH, Koh KH, Ngo TTT, Phan NM, Phan HK, Lee S |
3566 - 3569 |
Formation of isolated carbon nanofibers with hot-wire CVD using nanosphere lithography as catalyst patterning technique Houweling ZS, Verlaan V, ten Grotenhuis GT, Schropp REI |
3570 - 3574 |
Hot-wire CVD amorphous Si materials for solar cell application Wang Q |
3575 - 3577 |
Amorphous silicon thin film solar cells deposited entirely by hot-wire chemical vapour deposition at low temperature (< 150 degrees C) Villar F, Antony A, Escarre J, Ibarz D, Roldan R, Stella M, Munoz D, Asensi JM, Bertomeu J |
3578 - 3580 |
Optimization of KOH etching process to obtain textured substrates suitable for heterojunction solar cells fabricated by HWCVD Munoz D, Carreras P, Escarre J, Ibarz D, de Nicolas SM, Voz C, Asensi JM, Bertomeu J |
3581 - 3583 |
Comparison of a-Si TFTs fabricated by Cat-CVD and PECVD methods Nishizaki S, Ohdaira K, Matsumura H |
3584 - 3587 |
Trace detection of peroxides using a microcantilever detector Lock JP, Geraghty E, Kagumba LC, Mahmud KK |
3588 - 3590 |
Continuous hot-wire chemical vapor deposition on moving glass substrates Bink A, Brinza M, Jongen JPH, Schropp REI |
3591 - 3595 |
Metal oxide nanoparticles for advanced energy applications Lee SH, Deshpande R, Benhammou D, Parilla PA, Mahan AH, Dillon AC |
3596 - 3599 |
Flexible electrochromic devices based on crystalline WO3 nanostructures produced with hot-wire chemical vapor deposition White CM, Gillaspie DT, Whitney E, Lee SH, Dillon AC |
3600 - 3605 |
A hot-wire chemical vapor deposition (HWCVD) method for metal oxide and their alloy nanowire arrays Thangala J, Vaddiraju S, Malhotra S, Chakrapani V, Sunkara MK |
3606 - 3611 |
A directly patternable click-active polymer film via initiated chemical vapor deposition (iCVD) Im SG, Kim BS, Tenhaeff WE, Hammond PT, Gleason KK |
3612 - 3614 |
Initiated chemical vapor deposition of a siloxane coating for insulation of neural probes O'Shaughnessy WS, Edell DJ, Gleason KK |
3615 - 3618 |
Grafted polymeric nanostructures patterned bottom-up by colloidal lithography and initiated chemical vapor deposition (iCVD) Trujillo NJ, Baxamusa S, Gleason KK |
3619 - 3621 |
Nano-patterning of an iCVD polymer, followed by covalent attachment of QDs Lee CH, Tenhaeff W, Gleason KK |
3622 - 3624 |
A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method Takachi M, Yasuoka H, Ohdaira K, Shimoda T, Matsumura H |