화학공학소재연구정보센터

Thin Solid Films

Thin Solid Films, Vol.517, No.12 Entire volume, number list
ISSN: 0040-6090 (Print) 

In this Issue (54 articles)

3413 - 3414 Fifth international conference on hot-wire CVD (Cat-CVD) process Preface
Bouree JE, Mahan AH
3415 - 3419 Frontiers in HWCVD
Schropp REI
3420 - 3423 New application of Cat-CVD technology and recent status of industrial implementation
Matsumura H, Ohdaira K
3424 - 3426 Degradation and silicidation of Ta- and W-filaments for different filament temperatures
Kniffler N, Pflueger A, Scheller D, Schroeder B
3427 - 3430 Hot wire chemical vapor deposition: limits and opportunities of protecting the tungsten catalyzer from silicide with a cavity
Frigeri PA, Nos O, Bengoechea S, Frevert C, Asensi JM, Bertomeu J
3431 - 3434 Reversibility of silicidation of Ta filaments in HWCVD of thin film silicon
van der Werf CHM, Li H, Verlaan V, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI
3435 - 3438 Effect of ammonia on Ta filaments in the hot wire CVD process
Verlaan V, van der Werf CHM, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI
3439 - 3442 Low temperature decomposition of large molecules of TMA using catalyzers with resistance to oxidation in catalytic CVD
Ogita YI, Kudoh T, Iwai R
3443 - 3445 Resistance characteristics to oxidation of the metal-catalyzer for Cat-CVD
Kudoh T, Ogita YI
3446 - 3448 Detection of radical species produced by catalytic decomposition of H-2, O-2 and their mixtures on heated Ir surfaces
Umemoto H, Kusanagi H, Nishimura K, Ushijima M
3449 - 3451 Estimation of hydrogen radical density generated from various kinds of catalysts
Abe K, Ida M, Izumi A, Terashima S, Sudo T, Watanabe Y, Fukuda Y
3452 - 3455 N-2 decomposition by hot wire and N-2 post-deposition treatment on hydrogenated microcrystalline silicon thin films
Mazaki K, Tabata A, Kitagawa A, Kondo A
3456 - 3460 Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy
Gielis JJH, Hoex B, van den Oever PJ, de Sanden MCMV, Kessels WMM
3461 - 3465 A mechanistic study of gas-phase reactions with 1,1,3,3-tetramethyl-1,3-disilacyclobutane in the hot-wire chemical vapor deposition process
Tong L, Shi YJ
3466 - 3471 Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures
Le Normand F, Gulas M, Veis P, Cojocaru CS, Bouree JE
3472 - 3475 Precursor Cat-CVD a-Si films for the formation of high-quality poly-Si films on glass substrates by flash lamp annealing
Ohdaira K, Shiba K, Takemoto H, Fujiwara T, Endo Y, Nishizaki S, Jang YR, Matsumura H
3476 - 3480 Hot wire CVD deposition of nanocrystalline silicon solar cells on rough substrates
Li HBBT, van der Werf KHM, Rath JK, Schropp REI
3481 - 3483 Hot-wire chemical vapor deposition of silicon nanoparticles on fused silica
Salivati N, An YQ, Downer MC, Ekerdt JG
3484 - 3487 Composition and crystallinity of silicon nanoparticles synthesised by hot wire thermal catalytic pyrolysis at different pressures
Scriba MR, Britton DT, Arendse C, van Staden MJ, Harting M
3488 - 3491 Post deposition annealing temperature effect on silicon quantum dots embedded in silicon nitride dielectric multilayer prepared by hot-wire chemical vapor deposition
Panchal AK, Solanki CS
3492 - 3495 Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition
Liu FZ, Ma YH, Zhu MF, Yin PG
3496 - 3498 Doping of high-quality epitaxial silicon grown by hot-wire chemical vapor deposition near 700 degrees C
Martin IT, Branz HM, Stradins P, Young DL, Reedy RC, Teplin CW
3499 - 3502 The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD
Verlaan V, Verkerk AD, Arnoldbik WM, van der Werf CHM, Bakker R, Houweling ZS, Romijn IG, Borsa DM, Weeber AW, Luxembourg SL, Zeman M, Dekkers HFW, Schropp REI
3503 - 3506 Deposition of silicon nitride thin films by hot-wire CVD at 100 degrees C and 250 degrees C
Alpuim P, Goncalves LM, Marins ES, Viseu TMR, Ferdov S, Bouree JE
3507 - 3512 Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells
Finger F, Astakhov O, Bronger T, Carius R, Chen T, Dasgupta A, Gordijn A, Houben L, Huang Y, Klein S, Luysberg M, Wang H, Xiao L
3513 - 3515 Microcrystalline silicon carbide thin films grown by HWCVD at different filament temperatures and their application in n-i-p microcrystalline silicon solar cells
Chen T, Huang YL, Wang HY, Yang DR, Dasgupta A, Carius R, Finger F
3516 - 3519 Growth of silicon carbide thin films by hot-wire chemical vapor deposition from SiH4/CH4/H-2
Tabata A, Komura Y, Narita T, Kondo A
3520 - 3523 Importance of H-2 gas for growth of hot-wire CVD nanocrystalline 3C-SiC from SiH4/CH4/H-2
Hoshide Y, Komura Y, Tabata A, Kitagawa A, Kondo A
3524 - 3527 Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N-2 as doping gas
Hoshide Y, Tabata A, Kitagawa A, Kondo A
3528 - 3531 The growth of GaN films by alternate source gas supply hot-mesh CVD method
Komae Y, Saitou T, Suemitsu M, Ito T, Endoh T, Nakazawa H, Narita Y, Takata M, Akahane T, Yasui K
3532 - 3535 A direct correlation between film structure and solar cell efficiency for HWCVD amorphous silicon germanium alloys
Mahan AH, Xu Y, Gedvilas LM, Williamson DL
3536 - 3538 Initiated chemical vapor deposition of polymer films on nonplanar substrates
Baxamusa SH, Gleason KK
3539 - 3542 iCVD growth of poly(N-vinylimidazole) and poly (N-vinylimidazole-co-N-vinylpyrrolidone)
Chen GH, Lau KKS, Gleason KK
3543 - 3546 Crosslinking of copolymer thin films by initiated chemical vapor deposition for hydrogel applications
Tenhaeff WE, Gleason KK
3547 - 3550 Surface modification of high aspect ratio structures with fluoropolymer coatings using chemical vapor deposition
Gupta M, Gleason KK
3551 - 3554 HWCVD of polymers: Commercialization and scale-up
Lewis HGP, Bansal NP, White AJ, Handy ES
3555 - 3558 Heat transfer model of an iCVD reactor
Bakker R, Verlaan V, Verkerk AD, van der Werf CHM, van Dijk L, Rudolph H, Rath JK, Schropp REI
3559 - 3561 HFCVD of diamond and its application as electrode in aluminum electrolysis
Wang SS, Chen GH, Yang FL
3562 - 3565 Combined model for growing mechanism of carbon nanotubes using HFCVD: effect of temperature and molecule gas diffusion
Nguyen TH, Koh KH, Ngo TTT, Phan NM, Phan HK, Lee S
3566 - 3569 Formation of isolated carbon nanofibers with hot-wire CVD using nanosphere lithography as catalyst patterning technique
Houweling ZS, Verlaan V, ten Grotenhuis GT, Schropp REI
3570 - 3574 Hot-wire CVD amorphous Si materials for solar cell application
Wang Q
3575 - 3577 Amorphous silicon thin film solar cells deposited entirely by hot-wire chemical vapour deposition at low temperature (< 150 degrees C)
Villar F, Antony A, Escarre J, Ibarz D, Roldan R, Stella M, Munoz D, Asensi JM, Bertomeu J
3578 - 3580 Optimization of KOH etching process to obtain textured substrates suitable for heterojunction solar cells fabricated by HWCVD
Munoz D, Carreras P, Escarre J, Ibarz D, de Nicolas SM, Voz C, Asensi JM, Bertomeu J
3581 - 3583 Comparison of a-Si TFTs fabricated by Cat-CVD and PECVD methods
Nishizaki S, Ohdaira K, Matsumura H
3584 - 3587 Trace detection of peroxides using a microcantilever detector
Lock JP, Geraghty E, Kagumba LC, Mahmud KK
3588 - 3590 Continuous hot-wire chemical vapor deposition on moving glass substrates
Bink A, Brinza M, Jongen JPH, Schropp REI
3591 - 3595 Metal oxide nanoparticles for advanced energy applications
Lee SH, Deshpande R, Benhammou D, Parilla PA, Mahan AH, Dillon AC
3596 - 3599 Flexible electrochromic devices based on crystalline WO3 nanostructures produced with hot-wire chemical vapor deposition
White CM, Gillaspie DT, Whitney E, Lee SH, Dillon AC
3600 - 3605 A hot-wire chemical vapor deposition (HWCVD) method for metal oxide and their alloy nanowire arrays
Thangala J, Vaddiraju S, Malhotra S, Chakrapani V, Sunkara MK
3606 - 3611 A directly patternable click-active polymer film via initiated chemical vapor deposition (iCVD)
Im SG, Kim BS, Tenhaeff WE, Hammond PT, Gleason KK
3612 - 3614 Initiated chemical vapor deposition of a siloxane coating for insulation of neural probes
O'Shaughnessy WS, Edell DJ, Gleason KK
3615 - 3618 Grafted polymeric nanostructures patterned bottom-up by colloidal lithography and initiated chemical vapor deposition (iCVD)
Trujillo NJ, Baxamusa S, Gleason KK
3619 - 3621 Nano-patterning of an iCVD polymer, followed by covalent attachment of QDs
Lee CH, Tenhaeff W, Gleason KK
3622 - 3624 A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method
Takachi M, Yasuoka H, Ohdaira K, Shimoda T, Matsumura H