The topography of silane layers deposited on an inorganic surface was observed using atomic force microscopy. For this purpose, cleaved mica plates were treated with some silane coupling agents at various conditions. Silanes having a vinyl group as the organic functional group with mono-, di- and trialkoxy structures were used. Four different solvents for silane solutions, 2-propanol, 2-propanol/water mixture, water and toluene, were used. The pH of the aqueous solution was controlled. As a result, the suitable solvent and pH were identified in order to obtain a smooth silane layer. The solubility of silane in the solution, the wettability of silane onto the inorganic surface and the depression of the self-condensation of silane molecules in the solution were found to be important parameters for this purpose.