화학공학소재연구정보센터
Journal of Chemical and Engineering Data, Vol.54, No.6, 1698-1701, 2009
Thermal and Electrical Characterization of Materials for Phase-Change Memory Cells
The thermal properties of the phase-change chalcogenide alloy Ge(2)Sb(2)Te(5) in its three phases (amorphous, cubic, and hexagonal) and Of Si(3)N(4) and SiO(2) have been studied to obtain reliable values for device modeling. Thermal conductivity was determined, along with a quantitative estimation of the thermal resistances of the layers' interfaces, not negligible for highly scaled devices. Electrical resistivity of the chalcogenide material has also been investigated during the phase transition by in situ measurement at constant heating rate.