Pure ethyltrimethoxysilane was obtained by the distillation method, and its saturated temperatures at various pressures ranging from (2325 to 101 325) Pa were measured by means of an inclined ebulliometer. The correlation between vapor pressure and temperature was conducted with relative errors ranging from (0.03 to 0.38) %. The molar evaporation enthalpy (Delta(vap)H(m)) of ethyltrimethoxysilane in the temperature range from (306.4 to 397.2) K was estimated from the Clausius-Clapeyron equation.