The vapor pressure of ethyltriethoxysilane was measured from (335.0 to 432.0) K with a pressure range from (2.325 to 100.325) kPa using an inclined ebulliometer. The correlation between vapor pressure and temperature were conducted with the relative difference ranging from 0.01 to 0.18. The molar enthalpy of vaporization (Delta(vap)H(m)) of ethyltriethoxysilane in the experimental temperature range was calculated from the Clausius-Clapeyron equation.