화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.93, No.9, 2530-2533, 2010
Orientation and Phase Relationships between Titania Films and Polycrystalline BaTiO3 Substrates as Determined by Electron Backscatter Diffraction Mapping
Titania films have been grown on polycrystalline BaTiO3 (BTO) substrates at 700 degrees C by pulsed laser deposition. Electron backscatter diffraction (EBSD) was used to determine grain orientations in the substrate before growth, and the phase and orientation of the supported films after growth. All BaTiO3 grains within 26 degrees of (001) were covered by anatase films with an orientation relationship of (001)(Anatase)parallel to(001)(BTO) and [100](Anatase)parallel to[100](BTO). Rutile with a variety of orientations grew on BaTiO3 grains with orientations closer to (110) and (111). EBSD mapping provides an efficient means for determining phase and orientation relationships of films over all orientation parameters.