화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.95, No.2, 480-482, 2012
Ferroelectric PbTiO3 Nanodots Shattered Using Atomic Force Microscopy
A PbTiO3 (PTO) nanodot was formed on an Nb-doped SrTiO3 substrate using dip-pen nanolithography, using a PTO precursor sol. After drying and annealing to remove the solvent contained in the PTO nanodot, this dot had a diameter of about 40 nm. The nanodot was then shattered using an atomic force microscope, producing broken nanoparticles of various sizes, ranging from several nanometers to a few tens of nanometers. Finally, after the crystallization annealing process, ferroelectric PTO nanodots smaller than 10 nm in diameter were successfully fabricated. These small PTO nanodots exhibited good ferroelectric properties, as confirmed using a piezoelectric force microscope.