Sol-gel derived nanoporous TiO(2) membranes were prepared by coating a porous support with TiO(2) Colloidal solution, followed by drying and calcination at 450 degrees C. Self-tuning photocatalytic deposition was applied for the preparation of palladium membrane for hydrogen separation. The result of EPMA for cross section of Pd-TiO(2) membrane suggested the thickness of Pd-TiO(2) layer was around 1.5 mm. The permeance of hydrogen and nitrogen for Pd-TiO(2) membrane at 200 degrees C decreased to about 1/4 of initial values in the first 3.5 h of irradiation and approached steady-state values, indicating the possibility of self-tuning of the palladium layer. It was found that annealing improved hydrogen selectivity. For example, hydrogen to nitrogen permselectivity for Pd-TiO(2) membranes annealed at 450 degrees C in air for 8 It increased from 7 to 29 with hydrogen permeance of 6.3 x 10(-6) m(3) . m(-2) . s(-1) . kPa(-1) at 200 degrees C. This is because palladium particles could plug into the inter-particle pores after annealing the Pd-TiO(2) membrane.