Hydroxyapatite (HA) thin films has been successfully deposited by Nd:YAG laser ablation lambda = 532 nm. The morphology and microstructure of the deposited layers was studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and high resolution electron microscopy (HREM). Polycrystalline HA films were directly obtained with the substrate at 300 degreesC and without introducing water vapors in the deposition chamber. Electron paramagnetic resonance (EPR) measurements show that the oxygen stoichiometry in the HA films is also maintained. Depositions performed at lambda = 335 nm laser wavelength and 300 degreesC substrate temperature resulted in polycrystalline layers of mixed composition of HA and tricalciumphosphate (TCP). (C) 2004 Elsevier Ltd. All rights reserved.