화학공학소재연구정보센터
Materials Research Bulletin, Vol.47, No.3, 843-849, 2012
Spectroscopic studies on DLC/TM (Cr, Ag, Ti, Ni) multilayers
The hydrogen-free diamond-like carbon (DLC) films with transition metal (TM = Cr, Ag, Ti, Ni) interlayer (bilayer and multilayer) were deposited on to stainless steel and silicon substrates using pulsed laser deposition technique. Secondary ion mass spectroscopy (SIMS) confirmed that the films were hydrogen free. Incorporation of chromium inter layer reduced the stress value by about 3 GPa as determined by micro Raman spectroscopy. Incorporation of the TM inter layer enhanced the photoluminescence (PL) intensity as compared to the monolithic DLC films. The optical band gap determined by spectroscopic ellipsometry for DLC/TM films was found to be in the range of 1.56-1.67 eV. (C) 2011 Elsevier Ltd. All rights reserved.