화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.22, No.2, 285-295, 2002
Kinetics of sulfur oxide, sulfur fluoride, and sulfur oxyfluoride anions with ozone
Rate constants and product branching ratios were measured for eleven sulfur oxide, sulfur fluoride, and sulfur oxyfluoride anions reacting with O-3. The SO2- ion reacts rapidly to form -O-3(-) SO3-, and e(-). The temperature dependence of the branching ratio shows more reactive detachment and less SO3- formation at higher temperature. SO3- reacts with O-3, forming SO4- at 1/3 to 1/4 of the collisional rate from 200 to 500 K, respectively. At 300 K, SF6-, charge transfers to O-3 at 20% of the collisional rate, F2SO2- reacts with O-3 at a few percent of the collision rate, forming both O-3(-) and FSO3-; The ion F3SO- reacts slowly with O-3 to form F3SO2-. The ions SO4-, SF5-, FSO2-, FSO3-, F3SO-, and F5SO- are unreactive with O-3. A trend is noted relating the ion reactivity with the coordination of the central sulfur atom, i.e., the number of S-F bonds plus two times the number of S=O bonds. Only ions with a sulfur coordination of 4 or 6 are reactive, although the reaction rate constants are generally small, The reactivity trends appear to be partially explained by spin conservation, These reactions are all sufficiently slow, so O-3 reactions should not play a major role in SF6/O-2 discharges, All ions studied have been found to be unreactive with O-2.