화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.22, No.3, 351-369, 2002
Comparative calorimetric study of ICP generator with forward-vortex and reverse-vortex stabilization
Different methods of ICP stabilization are discussed, including the Reverse Vortex Stabilization, for which no previous well-described implementation is in science literature. Comparative calorimetric study was performed for two methods of stabilization: the Forward Vortex and the Reverse Vortex ones. Experiments were made for the ICP torch of invariable geometry with the power supply plate power up to 50 kW. Experimental technique is described and the tables with experimental data are presented. The efficiency of two studied methods is discussed primarily from the standpoint of plasma jet generation. It is demonstrated that the reverse-vortex stabilization is more efficient for almost all possible applications of ICP.