화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.24, No.2, 239-259, 2004
Temperature determination in air plasmas with chlorofluorocarboned molecules in the range 2500 K < T < 6000 K: Application to quantitative analysis of elemental pollutants
The diagnosis by emission spectroscopy of quasi-thermal air plasmas mixed with pollutants was performed for temperatures lower than 6000 K at atmospheric pressure. The applications concern monitoring of the destruction of chlorofluorocarbons (CFC) and the measurement of very low concentrations ( some ppb) of heavy metals ( copper) in air. The proposed methods are based on the simulation of the absolute intensity of the most intense molecular systems of the spectra ( systems Gamma of NO, A-X of OH and NH, Schumann-Runge of O-2 and violet of CN). The plasma composition of the mixtures (air + x% H2O + y% Cu + z% CCl2F2) and spectra simulation takes into account non-thermal equilibrium (T-g and T-e kinetic temperatures of gas and electrons with X = T-e/T-g). Six methods were selected and the conditions for their use were discussed. They were applied to the diagnosis of an air Inductively Coupled Plasma (64 MHz, 2.4 kW). Excellent agreement was obtained among them. Temperature variations lower than 50 K were able to be revealed and temperatures lower than 2600 K were measured. In a spectroanalysis context, it was shown that the partial pressure of metal nebulized in the discharge is uniform and that its excitation temperature T-Cu = T-g. The copper concentration was measured with an uncertainty which does not exceed 7%.