Decomposition of CFCl3 was investigated in an RF inductively coupled thermal reactor in neutral, oxidative and reductive conditions, and in a silent electric discharge (cold plasma) in neutral and oxidative conditions, respectively. In RF thermal plasma reactor, in neutral conditions, mainly gaseous products and minor amount of solid soot was formed. About 50% the soot could be extracted by toluene. Both the gas phase and the extract contained a wide range of aliphatic and aromatic compounds including chlorine and fluorine containing polyaromatic hydrocarbons (PAHs). In oxidative conditions much less soot was formed as compared to the neutral case. The solid product contained about 45% extractable fraction even in oxidative conditions. However, the extract contained less PAHs than in neutral conditions. In reducing atmosphere the soot yield was similar to the neutral case, but the soot contained 29% extractable fraction only. The extract consisted of polyhalogenated aromatic and polyaromatic hydrocarbons as main components. In neutral conditions different chlorofluorocarbons (CFCs) and chlorine were detected as gaseous products in cold plasma. In oxidative conditions, as final products of decomposition CO2, CFCs and Cl-3 were formed.