The processes of separation and high purification of carbon tetrafluoride and some other freons by distillating and membrane gas separating were considered. The selectivities of impurity and basic components separation in fluorocarbons mixture during of rectification and membrane separation were compared. The published data on the selectivity of different membranes were determined experimentally and compiled. The possibility of obtaining the carbon tetrafluoride with purity level 99.99-99.999 vol % by membrane separating was established.