A series of aromatic polyamides incorporating; silicon together with phenylquinoxaline or with hexafluoroisopropylidene groups :has been synthesized by solution polycondensation of a silicon-containing diacid chloride with aromatic diamines having phenylquinoxaline rings or hexafluoroisopropylidene groups. These polymers are easily soluble in polar aprotic solvents, such as N-methylpyrrolidinone and dimethylformamide, and in tetrahydrofurane, and can be solution-cast into thin, transparent films having low dielectric constant, in the range of 3.26 to 3.68. These polymers show high thermal stability with decomposition temperature being above 400 degrees C and glass transition temperature in the range of 236 degrees C to 275 degrees C.