It is a big challenge for all thin-film PV technologies to exhaust the high potential of cost reduction, which is beyond controversy. For Cu(In,Ga)Se-2 (CIGS) based PV modules, which have the highest efficiency potential among thin-film technologies, a productive industrial process technology has been not demonstrated up to now. In the ZSW line, the maximum efficiency for 30 cm x 30 cm was close to 13% (11% in average) at a high yield. In several batches, hundreds of modules were processed and characterized. Process statistics are described. First results of film depositions and processing on large area from the Wuerth Solar pilot line are presented. The concept for the integrated module line will be discussed. First modules in the square meter range are demonstrated with efficiencies >8 %. (C) 2002 Elsevier Science B.V. All rights reserved.