A novel power Micro Electro-Mechanical Systems concept, a micro-thermophotovoltaic (micro-TPV) system, is described in this work. The system uses hydrogen as fuel and is capable of delivering power in the order of watts in a package less than 1 cm(3) in volume. Based on the experimental results of micro-SiC flame tube combustor, emitters (radiators) and photovoltaic cells, a mathematical model is developed to evaluate the performance of the micro-TPV systems. As H(2) flow rate is 3.88 g/h, H(2)/air ratio is 0.95, A 4.40 W electrical power output can be expected in a micro-combustor of 0.113 cm(3) in volume. (C) 2003 Elsevier B.V. All rights reserved.