The liquid-phase deposition (LPD) as a novel deposition method of anti-reflective coating (ARC) for spherical silicon solar cells has been proposed. The LPD is a growth method in aqueous solution and can deposit thin films with uniform coverage over a spherical surface. The solar cell performance of the spherical silicon solar cell with an ARC shows more than 10% increase in short-circuit current density compared to that without an ARC. The result confirms that the LPD method is useful for ARC fabrications of spherical silicon solar cells. (c) 2006 Elsevier B.V. All rights reserved.