Transparent conductive indium tin oxide (ITO)/metal/ITO multilayer electrodes have been prepared by sputtering at room temperature. Ag and Cu thin films with thickness ranging from 5 to 35 nm have been used as intermediate metal layer, between ITO coatings of about 30nm thickness. Evolution of the optical and electrical characteristics of the multilayers as a function of each metal film thickness has been analyzed. High-quality transparent electrodes have been obtained, with sheet resistance below 6 Omega/sq for Ag film thickness above 10nm or Cu film thickness above 16nm. These multilayers also showed high transmittance in the visible spectral range, above 90% by discounting the glass substrate, with a maximum that is located at lower wavelength for Ag-based electrodes than for the Cu-based ones. After heating at 350 degrees C in flowing nitrogen, some improvement in the optoelectronical characteristics of the multilayer electrodes has been achieved that is related to the structural improvement of the ITO components. (c) 2008 Elsevier B.V. All rights reserved.