Textured boron-doped zinc oxide (ZnO:B) films, suitable as transparent and conductive layers in thin film silicon-based solar cells, have been obtained by low-pressure metalorganic chemical vapour deposition (LP-MOCVD) technique. The complex role of the boron doping in ZnO layers was examined and its influence on the morphological and structural properties was analysed. Furthermore, a correlation between such properties, intrinsic stress and carrier mobility in the film has been analysed. ZnO:B films have a polycrystalline structure with a columnar texture shape, they show a rough surface with pyramidal large grains. At the increase of the boron doping the pyramidal shape of the grains deteriorates and the average grain size reduces. Furthermore the a-lattice parameter decreases indicating that the boron incorporation introduces a deformation in the crystal. In addition to these large structural modifications, the decrease of the carrier mobility at the increase of the doping content is observed. At the same time, the boron content also plays a meaningful role on the intrinsic stress inside the film. Stress behaviour in ZnO films has been investigated by X-ray diffraction measurements using the sin(2) Psi method. Tensile stresses have been observed and the thermal and intrinsic components have been calculated. Respect to undoped ZnO films, boron incorporation on substitutional or interstitial sites increases the tensile stress by means of a lattice strain mechanism that reduces the d-spacing value. (c) 2008 Elsevier B.V. All rights reserved.