화학공학소재연구정보센터
Solar Energy Materials and Solar Cells, Vol.93, No.11, 1923-1927, 2009
Development of ZnO-based transparent conductive coatings
We have developed a range of single and multilayer transparent conducting coatings consisting of three to five alternating layers of Al-doped ZnO(AZO) and metals using E-beam evaporation method. The prepared optimized coatings show excellent optical and electrical properties, improved thermal and long-term stability. Optimum thickness of metal and AZO layers was determined for high optical transmittance and good electrical conductivity. X- ray diffraction, spectrophotometer, atomic-force microscopy, scanning electron microscopy and four-point probe were used to explore the possible changes in electricaland optical properties. It was found that the multilayer coatings consisting of Al-doped ZnO and Ag metals how satisfactory properties of low resistance of 5 Omega/sq, high transmittance of 90% and thermal stability upto 500 degrees C. (C) 2009 Elsevier B.V. All rights reserved.