ZnO(rod)/In(2)S(3)/CuInS(2) type ETA-cells were prepared by in-line chemical spray pyrolysis method. Effects of buffer layer thickness and ZnO nanorod length (500-1000 nm) were studied by means of SEM, I-V dependencies and EQE spectra. Conformal layer of In(2)S(3), obtained by spray of solution with pH=4.8, effectively protects ZnO nanorods from dissolution during the spray of acidic solutions. Increasing In(2)S(3) layer thickness reduces fluctuations of the cell output parameters, and increases V(OC) and FF; however, at certain thickness induces losses due to light absorption. The highest conversion efficiency 4.17% at AM1.5 was recorded from small contact area of the cell based on rods with length of 600 nm. Perspectives for further development are discussed. (C) 2010 Elsevier B.V. All rights reserved.