Polycrystalline Fe-doped TiO2 anatase films were deposited on (001) oriented SrTiO3 single crystal substrates at temperatures less than 200 degrees C from acidic aqueous solutions of titanyl sulfate and iron (III) nitrate. Epitaxial anatase TiO2 films were obtained when the films were annealed in air at 900 degrees C. Room-temperature ferromagnetic Fe-doped TiO2 thin films were obtained after repeated deposition and annealing steps. The observed saturation magnetization (> 0.28 mu(B)/Fe) could not be attributed to the presence of secondary phase magnetic iron oxides or iron clusters. (c) 2007 Elsevier B.V. All rights reserved.