Dense samarium doped ceria (SDC) thin films are deposited using electrostatic spray deposition (ESD) technique. The influences of nozzle shape on the distribution of liquid jet at the nozzle tip and the morphology of the deposited SDC films are elucidated. Geometries of three nozzles employed are flat, sawtooth and wedge tips. From the observation of jet formation, the nozzle in flat shape gives the highest distribution of emitted droplets. The deposited films are characterized using a combination of XRD, SEM and AFM techniques. XRD results reveal that the single-phase fluorite structure forms at a relatively low deposition temperature of 400 degrees C. The flat spray tip provides the most uniform and smooth thin films, and also presents the lowest agglomeration of particles on thin-film surface. (c) 2007 Elsevier B.V. All rights reserved.