Ti-Ni-Cu shape-memory alloy (SMA) thin films were sputter-deposited on heated polyimide substrates. Ti-Ni-Cu films deposited at substrate temperatures of 543 and 583 K were found to be crystalline. Especially, a Ti48Ni29Cu23 film deposited at 583 K exhibited a high martensitic transformation temperature above room temperature and a narrow transformation temperature range, which enable the film to be used at room temperature. Double-beam cantilevers made of 8 gm thick Ti48Ni29Cu23 films deposited on 12.5 and 25 gm thick polyimide substrates displayed a repeatable shape-memory effect by a battery of 1.5 V and it was verified that the composite film consisting of an 8 gm thick Ti48Ni29Cu23 film and a 25 mu m thick polyimide film is capable of moving 0.18 g wings of a dragonfly toy up and down. These results offer the prospect for using an SMA/polyimide actuator as a convenient small actuator, which will find wide-ranging applications. (c) 2008 Elsevier B.V. All rights reserved.