High spectral (1.5 cm(-1)) and spatial (similar to 1000 nm lateral and vertical) resolution Raman spectra taken at room temperature in the depth of a thin (350 nm) YBCO film with good superconducting properties are presented and discussed. The differences between Raman spectra corresponding to different depths in the film are interpreted as depth-dependant changes in the film's structure, degree of oxygenation, and superconducting properties. These changes are in agreement to what we expect from a film obtained by pulsed laser deposition technique. The resonance of the most significant Raman shift (500 cm(-1)), monitoring the oxygen content of YBCO films, for 488 nm excitation light, was used to overcome the relatively small penetration depth of visible light in YBCO (similar to 200 nm). We found the range of parameters for the depth profiling Raman system such as to obtain the maximum signal intensity and a reasonable number of distinctive Raman spectra corresponding to different depths of the YBCO film. (C) 2008 Elsevier B.V. All rights reserved.