Alpha alumina thin film coatings were deposited by Alternating Current inverted magnetron sputtering technique. 1 micron thick coatings were deposited on silicon at 3 different power levels (4, 5 and 6 kW) and 3 different oxygen partial pressure ratios (40, 50 and 60% by volume) for studying the tribological properties such as adhesion, hardness, wear resistance, coefficient of friction, and wear rate. Maximum critical load of 30 N was obtained by scratch test. Hardness was measured as 20 GPa. The coating with 5 kW and 50% oxygen partial pressure ratio showed the best wear resistance and coefficient of friction properties. The wear behavior of alpha alumina at different sliding distance was studied. (C) 2008 Elsevier B.V. All rights reserved.