Large-grained and 7 mu m thick CdTe film has been fabricated on top of Mo coated soda-lime glass substrate. As a new approach the dynamic recrystallization process (DRC) was used to form the structure of films. For the characterization of the structure and composition of the films a scanning electron microscopy (SEM), energy dispersive X-ray microanalysis (EDS) and X-ray diffraction (XRD) methods were used. The changes in the structure of films were studied in accordance with the process temperature, pressure and as-deposited film thickness. Significant changes in the CdTe film were observed after DRC of deposited films at the process temperatures between 450 degrees C and 550 degrees C. EDS quantitative analysis showed that during the recrystallization the Mo and CdTe films composition remained stable for all studied samples. The XRD results showed that the increase in the process temperature caused improvement in orientation of the films along direction of (111). The DRC temperature above 550 degrees C reduced the orientation again. The limits of the temperature and pressure in application of soda-lime glass in DRC were found and discussed. (C) 2008 Published by Elsevier B.V.