We present approaches to reduce the absorber thickness of CdTe solar cells. The investigations were done with CdTe absorber films deposited by the close-space sublimation (CSS) technique. Using these CdTe films, complete solar cells were produced in our own laboratory. The absorber thickness as the crucial parameter was varied between 1 and 11 mu m in these experiments. It is analyzed how process steps following the CdTe layer deposition influence the structure of the absorber films as well as the solar cell properties. Three ways of back contact formation are compared. These include (i) the wet chemical etching of the CdTe surface, (ii) a plasma etching step, and (iii) the vacuum deposition of a thin intermediate copper layer. In the latter case, voids and shunts related to preferential etching at grain boundaries are avoided admitting the use of thinner absorber films. Thus, the solar-cell efficiencies were increased from below 9% to more than 10% while the CdTe film thickness was reduced from 11 mu m to less than 4 mu m. (C) 2008 Elsevier B.V. All rights reserved.