In this work ITO thin films have been grown onto glass, polyethylene terephthalate (PET) and Arylite polymer substrates by sputtering at room temperature. The In2S3 films were chemically deposited on ITO during different times, forming bilayers for subsequent photovoltaic applications. Optical properties of the films were investigated from the transmittance and the structural properties by XRD. Transmittance of the films varies with deposition time and the different substrates used, the same as the adherence and the homogeneity of the films. (C) 2008 Elsevier B.V. All rights reserved.