Thin Solid Films, Vol.517, No.7, 2524-2526, 2009
Multi-stage evaporation of Cu2ZnSnS4 thin films
Multi-stage evaporation is a well-established method for the controlled growth of chalcopyrite thin films. To apply this technique to the deposition of Cu2ZnSnS4 thin films we investigated two different stage sequences: (A) using Cu2SnS3 as precursor to react with Zn-S and (B) using ZnS as precursor to react with Cu-Sn-S. Both Cu2SnS3 and ZnS are structurally related to Cu2ZnSnS4. In case (A) the formation of copper tin sulphide in the first stage was realized by depositing Mo/SnSx/CuS (1