A general theoretical model was developed to predict the creep deformation and its effect on the stress relaxation and distribution in the multilayer systems under residual stress and external bending. Based on the proposed solution, a simplified solution for the special case of one film layer on a substrate is also presented. Finite element analysis was carried out to validate the presented model. Good agreements were observed between the finite element simulation and the prediction of the proposed model. In addition, the effects of film thickness on creep strain and stress distribution, the creep effect on neural axis location in the bilayer assembly subjected to the combination of residual stress and external bending were also discussed. (C) 2009 Elsevier B.V. All rights reserved.