화학공학소재연구정보센터
Thin Solid Films, Vol.517, No.9, 2974-2978, 2009
Ferroelectric and pyroelectric properties of (Na0.5Bi0.5)TiO3-BaTiO3 based trilayered thin films
Trilayered Bi3.25La0.75Ti3O12 (25 nm)/(Na0.5Bi0.5)(0.94)Ba0.06TiO3 (300 nm)/Bi3.25La0.75Ti3O12 (25 nm) and Pb (Zr0.4Ti0.6)O-3 (25 nm)/(Na0.5Bi0.5)(0.94)Ba0.06TiO3 (300 nm)/Pb(Zr0.4Ti0.6)O-3 (25 nm) thin films without undesirable phases have been deposited on Pt/Ti/SiO2/Si substrates. It was found that the Bi3.25La0.75Ti3O12 and Pb(Zr0.4Ti0.6)O-3 layers are very effective to inhibit the charge transport in the trilayered films. Much better insulating properties than those of (Na0.5Bi0.5)(0.94)Ba0.06TiO3 films have been achieved in the trilayered films. The trilayered films show good dielectric. ferroelectric and pyroelectric properties. Remnant polarizations 2P(r) of 16 mu C/cm(2) and 34 mu C/cm(2), pyroelectric coefficients of 4.8 x 10(-4) C m(-2) K-1 and 7.0 x 10(-4) C m(-2) K-1 have been obtained for the Bi3.25La0.75Ti3O12/(Na0.5Bi0.5)(0.94)Ba0.06TiO3/Bi3.25La0.75Ti3O12 and Pb(Zr0.4Ti0.6)O-3/ (Na0.5Bi0.5)(0.94)Ba0.06TiO3/Pb(Zr0.4Ti0.6)O-3 thin films, respectively. The trilayered films are promising candidates for sensor and actuator applications. (C) 2008 Elsevier B.V. All rights reserved.