An ultra-thin Pt layer could be used as a transparent conducting anode to replace the ITO used today in a top-emitting OLED. A proper thickness of Pt thin layer is needed to avoid large leakage current while still keeping the high transparency for visible light. X-ray reflectivity and AFM were used to measure the morphology of e-gun deposition Pt thin films grown on glass substrates. The islands grown on the glass coalesced at the thickness of less than 4 nm. For the sample of 4 nm thickness, the sheet resistance is 800 Omega/square with a transparency of 65%. (c) 2009 Elsevier B.V. All rights reserved.