(001) SrRuO3 (SRO), (001) CaRuO3 (CRO) and (205) BaRuO3 (BRO) thin films were epitaxially grown on (001) LaAlO3 substrates by laser ablation, and the effect of lattice matching on the microstructure and electrical conductivity was investigated. (001) SRO and (001) CRO thin films had a terrace with orthogonal step structure, whereas (205) BRO thin film had an orthogonal structure with tetragonal grains. Epitaxial thin films showed metallic conduction, and the (001) CRO thin films exhibited the highest electrical conductivity, i.e. 1.5 x 10(5) S m(-1), among the (001) SRO, (001) CRO and (205) BRO thin films. The smaller misfit between thin film and substrate could be associated with the higher electrical conductivity. (C) 2009 Elsevier B.V. All rights reserved.