Previous Article Next Article Table of Contents Thin Solid Films, Vol.517, No.20, 5949-5949, 2009 DOI10.1016/j.tsf.2008.10.034 Export Citation Rapid synthesis of tantalum oxide dielectric films by microwave assisted atmospheric chemical vapor deposition (vol 516, pg 8307, 2008) Ndiege N, Subramanian V, Shannon MA, Masel RI Please enable JavaScript to view the comments powered by Disqus.
