In this study, stab and ridge optical waveguides (OWGs) made of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and hybrid sensors using OWG spectroscopy and the QCM technique were prepared. Polyvinyl alcohol (PVA) film with CoCl(2) was deposited on the OWGs, and the characteristics of humidity sensing were investigated. A prism coupler was used to enter a He-Ne laser beam (lambda = 632.8 nm) to the slab OWG. The output light intensity markedly changed due to chromism of the CoCl(2) as a result of humidity sorption, and this change was dependent on the incident angle of the laser beam to the slab OWG. During the measurement of output light, the QCM frequency was simultaneously monitored. The humidity dependence of the sensor with the slab OWG was also investigated in the range from 15 to 85%. For the sensor with the ridge OWG, white light was entered by butt-coupling, and the characteristics of humidity sensing were investigated by observing the output light spectrum and the QCM frequency. (C) 2009 Published by Elsevier B.V.