화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.14, 3619-3624, 2010
Measurement of the refractive index and thickness of a transparent film from the shift of the interference pattern due to the sample rotation
A method is described for the simultaneous measurement of the refractive index and thickness of a transparent film. The method is based on the rotational shift of the interference pattern caused by the change of the light incidence angle. The refractive index is evaluated without any prior information about film thickness or about the substrate and its refractive index. In addition, the roughness of the interfaces and/or the presence of an unidentified thin layer are not important. In two experimental examples, the refractive index and thickness are measured for a GaN thin film and a cling-film. (C) 2009 Elsevier B.V. All rights reserved.