Hydrophobic micro/nano-engineered surfaces (MNESs) with good adhesion and frictional performances were fabricated by the combination of aluminum-induced crystallization (AIC) of amorphous silicon (a-Si) and octadecyltrichlorosilane COTS) coating. The AIC of a-Si technique was used to produce silicon micro/nano-textured surfaces, while an OTS self-assembled monolayer was used to lower the surface energies of the textured surfaces. The wetting properties of the MNESs were studied using a video-based contact angle measurement system. The adhesion and friction properties of the MNESs were investigated using a TriboIndenter. This study shows that the adhesion and frictional performances of all MNESs are significantly improved compared to untreated silicon substrate surfaces, and the adhesion and frictional performances of the OTS-modified textured surfaces strongly correlate to their surface wetting property, i.e., the larger the water contact angle, the better the adhesion and frictional performances of the OTS-modified textured surfaces. (C) 2010 Elsevier B.V. All rights reserved.