Zn(1-x)Fe(x)O thin films with different Fe content were deposited on glass substrates at 450 degrees C by spray pyrolysis technique. The effect of doping on the structural and optical properties of ZnO films was investigated. X-ray diffraction has shown that the films are polycrystalline- and textured with the c-axis of the wurtzite structure along the growth direction. Scanning electron microscopy has shown that the surface of the films are homogeneous. The magnetic measurements performed at 5 K using a SQUID magnetometer showed the co-existence of paramagnetic, antiferromagnetic and ferromagnetic contributions. (C) 2009 Elsevier B.V. All rights reserved.