We applied Er(2)O(3) nanoparticles, P(2)O(5) particles, and spin-on-glass (SOG) solution to form erbium-doped silica thin films exhibiting photoluminescence at 1530 nm. We further investigated the annealing condition and composition of the spin-coated film. The addition of P(2)O(5) improved PL peak intensity of the erbium-doped film fivefold. The weight ratio of Er(2)O(3) nanoparticles to P(2)O(5) particles in the SOG was found to be 0.54 for efficient light emission. (c) 2010 Elsevier B.V. All rights reserved.